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Classifying non-uniformities on the surface of a semiconductor

[Category : - ELECTRONICS]
[Viewed 1198 times]

A method and system for identifying and classifying non-uniformities on the surface of a semiconductor or in a semiconductor. The method and system involves scanning the wafer surface with a non-vibrating contact potential difference sensor to detect the locations of non-uniformities, extracting features characteristic of the non-uniformities, and applying a set of rules to these features to classify the type of each non-uniformity.

Patent publications:

 US 7900526
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aarontc (United States)

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